EUV

Latest about EUV

Zeiss expands German site that caps ASML's EUV scanner output

By Luke James Published

Zeiss Semiconductor Manufacturing Technology is adding around 25,000 square meters of production and production-adjacent space at Oberkochen in southern Germany.

Tech Industry
ASML's planned Low-NA EUV machine price hikes reportedly anger TSMC

By Anton Shilov Published

Premium Low-NA, high stakes

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ASML looks to increase prices of its Low-NA EUV tools beyond existing productivity-based model — company wants to capture the value of all the advantages its tools offer, not just wafer throughput improvements

By Anton Shilov Published

ASML's comments point to intentions to increase prices, though the company is expected to maintain its value-based approach to price setting. Yet, TSMC is reportedly unhappy about the potential plan.

Semiconductors
Intel expands production of photomasks in California: EUV and High-NA EUV in the focal point

By Anton Shilov Published

Intel begins expansion of its Bowers Campus in Santa Clara to produce more photomasks in-house, which is set to be crucial as process technologies get more sophisticated.

Semiconductors
ASML denies US government report that its EUV chipmaking tool was shipped to China

By Anton Shilov Published

U.S. Commerce Secretary Lutnick expresses concerns in a conversation with ASML executives that China has an EUV lithography system as ASML denies shipping such scanners to the PRC.

Semiconductors
Japanese chemical giant JSR expands to Taiwan for EUV photoresist production near TSMC

By Luke James Published

Premium The plant, located in Yunlin County, is expected to come online as early as 2028 and will co-develop advanced photoresists with TSMC.

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ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond

By Luke James Published

Premium ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating €32.7 billion in total revenue and ending the year with a €38.8 billion order backlog.

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SK hynix places record $8 billion order for ASML EUV lithography machines

By Luke James Published

SK hynix disclosed in a regulatory filing on Tuesday that it will purchase 11.9 trillion won ($7.9 billion) worth of EUV lithography equipment from ASML.

Semiconductors
IBM and Lam's new partnership paves the way toward sub-1nm logic using High-NA EUV

By Luke James Published

Premium Under the new agreement, the focus will shift to validating full process flows for nanosheet and nanostack device architectures and backside power delivery.

Premium
China's top chip execs claim ASML alternative 'small, fragmented, and weak'

By Luke James Published

China's most senior semiconductor executives issued a public call this week for a consolidated national effort to build a domestic alternative to Dutch lithography giant ASML.

Semiconductors
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