DUV
Latest about DUV

By Luke James Published
A state-backed company in Shanghai has begun mass-producing immersion deep ultraviolet lithography machines and is due to deliver the first units this year.

By Luke James Published
Nikon will try to claw back lithography customers by selling argon fluoride (ArF) tools for less than the market leader, ASML.

By Luke James Published
Premium ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating €32.7 billion in total revenue and ending the year with a €38.8 billion order backlog.

By Anton Shilov Published
Bipartisan group of lawmakers want the U.S. government to impose export controls on all wafer fab equipment bound to China except those that can be made locally and make allies do the following.

By Luke James Published
Premium Chinese fabs are quietly extending the useful life and performance of older ASML deep ultraviolet lithography systems by upgrading key subsystems, as Beijing pushes to sustain advanced chip output.

By Luke James Published
Premium Japan’s Dai Nippon Printing (DNP) claims to have developed a nanoimprint lithography template capable of patterning logic with a feature size of 1.4nm, with plans for mass production in 2027.

By Anton Shilov Published
Premium But chipmakers already know this empirically.

By Luke James last updated
Premium Think tank suggests tighter semiconductor controls amid rare earth tensions.

By Luke James Published
Premium With EUV locked out by sanctions, China is leaning on DUV multi-patterning and fledgling domestic scanners.

By Anton Shilov Published
Huawei-linked Chinese startup has developed a nearly complete suite of semiconductor manufacturing tools to enable fully domestic chip production amid escalating export controls.
Get Tom's Hardware's best news and in-depth reviews, straight to your inbox.